Terahertz Spectroscopic Device for Semiconductor Electrical Characteristic Evaluation / Terahertz Ellipsometer
It is the only device capable of measuring the frequency dependence of complex permittivity (complex refractive index).
It is possible to measure phase information simultaneously along with electric field strength.
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basic information
A terahertz ellipsometer is a device that analyzes the reflection of elliptical polarized light caused by the incidence of terahertz waves, which are in the frequency range of 1 THz and have a wavelength of around 300 μm, traditionally referred to as infrared or millimeter waves. Terahertz waves possess transparency and the ability to identify materials, making them optimal for microscopic observation due to their shorter wavelengths than radio waves. Because they are low-energy, they can also be applied to observe the bonding states between molecules. The terahertz spectrometer/terahertz ellipsometer handled by Seika Digital Image can simultaneously measure phase information along with electric field strength.
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Applications/Examples of results
High-resistance silicon wafer Transmittance of resin material Distribution measurement of SiC substrate Measurement of GaAs epitaxial substrate
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