High rigidity design enables high-speed transport of glass substrates! ISO Class 2 clean robot.
The "HR81315-1900" is a linear double-arm clean robot equipped with an all-axis ABS encoder AC servo motor. It transports glass substrates at high speed due to its high rigidity design. It holds the glass substrates by attaching anti-slip pads to the top surface of the CFRP fork. Additionally, it features a CFRP fork that is heat-resistant up to 250°C. 【Features】 ■ Equipped with various sensors ■ All-axis ABS encoder AC servo motor specification ■ Dedicated command control via RS232C ■ Substrate holding: Glass substrates are held by attaching anti-slip pads to the top surface of the CFRP fork ■ Fork: 250°C heat-resistant CFRP fork *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications】 ■Arm ・Operating range: 1315mm ・Transport speed: 1315mm/1.3sec ・Resolution: 0.1mm or less ■Rotation ・Operating range: 310 degrees ・Transport speed: 180 degrees/2.5sec ・Resolution: 0.001 degrees ■Up and down ・Operating range: 1900mm ・Transport speed: 1900mm/2.0sec ・Resolution: 0.1mm or less ■Transported item: 750×650, thickness 0.4mm glass substrate ■Repeat accuracy: within ±0.2mm ■Cleanliness: ISO Class 2 *For more details, please refer to the PDF document or feel free to contact us.
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【Usage】 ■ FPD Field *For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."