Full-axis 2P stepping motor specifications! Link-type single-arm clean robot.
The SR1160-310 is a link-type single-arm clean robot with a hand that can rotate 180°. The hand section comes with a rotary unit. It can accommodate other wafer size hands by replacing the mounting block. As an option, various sensors for positioning and air pressure confirmation are available. 【Features】 ■ Hand: KUMADE FORK KMWF-12SF ■ The hand section includes a rotary unit ■ Various sensors included (positioning, air pressure confirmation) *optional ■ All axes are equipped with 2P stepping motors ■ Hand can rotate 180° *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications】 ■Arm ・Operating range: Forward 543mm, Backward 103mm ・Transport speed: 530mm/0.9sec ・Resolution: Below 15μm ■Rotation ・Operating range: 330 degrees ・Transport speed: 180 degrees/0.9sec ・Resolution: 0.00359 degrees ■Vertical ・Operating range: 306mm ・Transport speed: 306mm/1.2sec ・Resolution: 5μm ■Rotary ・Operating range: 180 degrees ・Transport speed: 180 degrees/1.2sec ■Transported object: 12-inch silicon wafer ■Repeatability: Within ±0.1mm ■Cleanliness: ISO Class 2 *For more details, please refer to the PDF document or feel free to contact us.
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【Usage】 ■Semiconductor field *For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."