The lower inversion axis allows for vacuum suction of wet wafers! Double-arm clean robot.
The "SR2160-310" is a link-type double-arm clean robot equipped with an inversion unit and a mapping unit. To address issues with wet wafers, the lower inversion axis is capable of vacuum suction for wet wafers. To prevent water from entering the robot's drive components, water catchers have been installed in both the arm drive unit and the main body drive unit. 【Features】 ■ Includes inversion unit and mapping unit ■ Water catchers installed in arm drive unit and main body drive unit ■ Special ceramic chuck included (optional) ■ Positioning sensor included (optional) *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications】 ■ Arm - Operating range: 480mm - Transport speed: 480mm/1.1sec - Resolution: 21μm or less ■ Rotation - Operating range: 330 degrees - Transport speed: 180 degrees/1.0sec - Resolution: 0.00359 degrees ■ Up and Down - Operating range: 310mm - Transport speed: 310mm/1.2sec - Resolution: 5μm ■ Inversion - Operating range: 190 degrees - Transport speed: 190 degrees/1.2sec - Resolution: 0.11250 degrees ■ Mapping - Operating range: 70mm - Transport speed: 70mm/1.2sec - Resolution: 13μm ■ Transported items: 2, 3, 4, 6-inch silicon wafers ■ Repetition accuracy: within ±0.1mm ■ Cleanliness: ISO Class 2 *For more details, please refer to the PDF document or feel free to contact us.
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【Application】 ■Semiconductor field *For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."