Single-arm clean robot using contact sealing method for vacuum sealing.
The "EV2250" is a parallel link single-arm clean robot that uses a contact sealing method for its vacuum seal. The arm section has been treated with Alpicca. In addition to being equipped with a two-phase pulse motor with an encoder, it supports RS232C communication control and parallel I/O control. 【Features】 ■ Heat-resistant use: Installation of a reflector (thermal reflective plate) on the arm ■ Arm section treated with Alpicca ■ Equipped with a two-phase pulse motor with an encoder ■ RS232C communication control ■ Parallel I/O control *For more details, please refer to the PDF materials or feel free to contact us.
Inquire About This Product
basic information
【Specifications】 ■Arm ・Operating Range: 453mm ・Transport Speed: 453mm/1.5sec ・Resolution: Below 40.90615mm ■Rotation ・Operating Range: 330 degrees ・Transport Speed: 180 degrees/2.0sec ・Resolution: 0.0046875 degrees ■Object to be transported: □125mm Quartz substrate ■Repeatability: Within ±0.1mm *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Application】 ■Semiconductor field *For more details, please refer to the PDF document or feel free to contact us.
catalog（2）
Download All Catalogs
Company information
Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."