High rigidity arm specification with Teflon coating! Equipped with a transparent mapping sensor in the handle.
The "WR2154-300" is a waterproof double-arm clean robot. The arm section above the mounting flange complies with the IP64 standard. The hand section is equipped with a transmissive mapping sensor capable of vertical/horizontal operation. Additionally, it can accommodate rotary and clamp units. 【Features】 ■ Arm section: Teflon-coated, high-rigidity arm specification ■ Capable of mounting rotary and clamp units ■ Wafer holding: Vacuum suction using ceramic chucks ■ Equipped with a two-phase pulse motor with encoder ■ Control: RS232C communication control or parallel I/O control *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications】 ■Arm ・Operating range: Forward 508mm, Backward 108mm ・Transport speed: 508mm/0.9sec ・Resolution: Below 15μm ■Rotation ・Operating range: 330 degrees ・Transport speed: 180 degrees/0.9sec ・Resolution: 0.00359 degrees ■Up and Down ・Operating range: 300mm ・Transport speed: 300mm/1.0sec ・Resolution: 5μm ■Items to be transported: 6, 8, 12 inch silicon wafers ■Repeatability: Within ±0.1mm *For more details, please refer to the PDF document or feel free to contact us.
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【Application】 ■Semiconductor field *For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."