Equipped with control line for clamp hand! Robot + slider system
The "SSR1160+S2244-S001" is a system consisting of a link-type single-arm robot and a slider. It is equipped with a control line for the clamp hand. It clamps the front and rear end faces to hold the substrate. It is equipped with a two-phase pulse motor with an encoder on all axes. 【Features】 ■ Substrate holding: clamps the front and rear end faces ■ Equipped with a two-phase pulse motor with an encoder on all axes ■ Equipped with various sensors ■ RS232C control or parallel I/O control *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications】 ■Arm ・Operating range: 513mm ・Transport speed: 513mm/1.2sec ・Resolution: 15μm or less ■Rotation ・Operating range: 330 degrees ・Transport speed: 180 degrees/1.0sec ・Resolution: 0.00359 degrees ■Vertical movement ・Operating range: 330mm ・Transport speed: 330mm/1.2sec ・Resolution: 5μm ■Slider ・Operating range: 2244mm ・Transport speed: 2244mm/3.5sec ・Resolution: 12.5μm ■Items to be transported: 150×150×6.35t glass substrate, 150×150×3.0t glass substrate ■Repeat accuracy: within ±0.1mm *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."