Speed up the 4-port sorter and improve throughput! Compatible with 6 and 8-inch wafers.
This product is a device that accelerates a 4-port sorter and improves throughput. All cassette stages have lifting functions, and sorting is performed by two robots for retrieval and storage. Additionally, it is capable of splitting from one cassette to three cassettes and integrating from three cassettes to one cassette. It can be linked with factory systems to select transfer patterns for each lot. 【Features】 ■ Compatible with 6 and 8-inch wafers ■ All cassette stages have lifting functions ■ Sorting is performed by two robots for retrieval and storage ■ Capable of splitting from one cassette to three cassettes and integrating from three cassettes to one cassette ■ Can be linked with factory systems to select transfer patterns for each lot *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Equipment】 ■ Two single-arm robots ■ Aligner ■ ID reader ■ Elevating 4-port stage ■ Control equipment (including basic transfer software) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."