Introducing a device with a cassette stage that has 4 ports, compatible with 6 and 8-inch wafers.
This product is a device equipped with a cassette stage with 4 ports and a sorting function based on wafer ID reading. It is capable of splitting from 1 cassette to 3 cassettes and integrating from 3 cassettes to 1 cassette. It can be linked with factory systems to select transfer patterns for each lot. 【Features】 ■ Compatible with 6 and 8-inch wafers ■ Equipped with a sorting function based on wafer ID reading ■ Capable of splitting from 1 cassette to 3 cassettes and integrating from 3 cassettes to 1 cassette ■ Can be linked with factory systems to select transfer patterns for each lot *For more details, please refer to the PDF materials or feel free to contact us.
Inquire About This Product
basic information
【Equipment】 ■ Double Arm Robot (with slide) ■ Aligner ■ ID Reader ■ 4-Port Stage ■ Control Equipment (including basic transfer software) *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."