Introducing an inspection device compatible with 6 and 8-inch wafers, equipped with laser marking.
This product is a device equipped with laser marking and marker counting functions for macro-micro inspection systems. The macro unit, micro unit, and laser marking chamber are supplied with wafers automatically by a transport unit. It allows for macro visual observation and micro microscopic observation, and can perform automatic laser marking at specified coordinates in conjunction with a higher-level system. 【Features】 ■ Compatible with 6 and 8-inch wafers ■ Equipped with laser marking and marker counting functions ■ Capable of macro visual observation and micro microscopic observation ■ The macro unit, micro unit, and laser marking chamber are automatically supplied with wafers by a transport unit ■ Can perform automatic laser marking at specified coordinates in conjunction with a higher-level system *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Equipment】 ■ Double Arm Robot ■ Aligner ■ Macro Unit ■ Micro Unit ■ Laser Marker ■ Vibration Isolation Table ■ Control Equipment (including basic transfer software) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Company information
Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."