Collaboration with defect data from other inspection systems! Automatic defect review equipment compatible with 8-inch wafers.
This product is designed to integrate with defect data from other inspection systems, automatically capturing images at specified coordinates and saving or sending them to other systems. The automatic transport unit conveys the wafer to the XY stage of the review unit. It can automatically capture images at specified coordinates of received defect data at high magnification (100x, 150x). 【Features】 ■ Supports 8-inch wafers ■ Automatically captures images at specified coordinates and saves or sends them to other systems ■ The automatic transport unit conveys the wafer to the XY stage of the review unit ■ Capable of automatically capturing images at specified coordinates of received defect data at high magnification (100x, 150x) *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Equipment】 ■ Double Arm Robot ■ Alina ■ Automatic Review Unit ■ Control Equipment (including basic transfer software) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."