8-inch wafer compatible automatic visual inspection system (AOI)

Preventing human error: Automatically detect foreign objects, scratches, cracks, and chipping on both sides of the wafer! Data storage and system integration are also available.

This product is an automatic visual inspection device that automatically detects registered types of defects from images captured in the inspection section. It transports the wafer without making contact with the central part using an edge grip hand. Defect detection targets both sides of the wafer. The automatic transport unit carries the wafer to the XY stage of the inspection section, captures images of the entire surface, then flips it over to capture images of the other side. 【Features of the Automatic Visual Inspection Device】 ■ Compatible with 8-inch wafers ■ Detected defects are displayed on the wafer map with their locations ■ Data can be saved and linked to higher-level systems with arbitrary operations ■ Equipped with a double-arm robot, aligner, flipping unit, automatic imaging unit, and control equipment (including basic transfer software) ■ Transports wafers without making contact with the central part using an edge grip hand *For more details, please refer to the PDF document or feel free to contact us.

Contract manufacturingOther inspection equipment and devices