Preventing human error: Automatically detect foreign objects, scratches, cracks, and chipping on both sides of the wafer! Data storage and system integration are also available.
This product is an automatic visual inspection device that automatically detects registered types of defects from images captured in the inspection section. It transports the wafer without making contact with the central part using an edge grip hand. Defect detection targets both sides of the wafer. The automatic transport unit carries the wafer to the XY stage of the inspection section, captures images of the entire surface, then flips it over to capture images of the other side. 【Features of the Automatic Visual Inspection Device】 ■ Compatible with 8-inch wafers ■ Detected defects are displayed on the wafer map with their locations ■ Data can be saved and linked to higher-level systems with arbitrary operations ■ Equipped with a double-arm robot, aligner, flipping unit, automatic imaging unit, and control equipment (including basic transfer software) ■ Transports wafers without making contact with the central part using an edge grip hand *For more details, please refer to the PDF document or feel free to contact us.
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【Types of Defects to Detect】 ■Surface: Outer edge chipping, shape, size, and scattering condition of ink marks ■Back side: Foreign substances, dirt, outer edge chipping, dents, cross cracks, scratches (other than polishing marks), etc. *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."