Hexafluorobutadiene has a very low global warming potential (GWP) and a short atmospheric lifetime, making it a substance with very low environmental impact.
Hexafluoro-1,3-butadiene (C4F6) has a very low global warming potential (GWP) and a short atmospheric lifetime, resulting in a very small environmental impact. It is characterized by a fast etching rate, high selectivity, and precision, making it suitable for high aspect ratio semiconductor etching processes in the fine processing of silicon oxide films. Additionally, it is used as a raw material in the development of fluorine-based functional materials in organic synthesis.
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basic information
CAS NO. 685-63-2 UN Number UN 3160 Molecular Weight (g/mol) 162.03 ASHRAE Name PFO-2316 Appearance Colorless, odorless gas Critical Temperature (°C) 139.6 Density (g/cm3, ‒15°C) 1.44 Critical Pressure (MPa) 31.9 Melting Point (°C) ‒130 Vapor Pressure (MPa, 25°C) 2.11 Boiling Point (°C) 5.5 Flash Point Flammable Ozone Depletion Potential (ODP) 0 Global Warming Potential (GWP) < 1
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Prices may vary depending on quantity and purity.
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P2
Delivery Time
P4
Applications/Examples of results
Etching gas Organic synthesis materials
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