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  6. Device lineup for MEMS sensing and network devices

Device lineup for MEMS sensing and network devices

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last updated:Nov 26, 2021

日立ハイテク
日立ハイテク
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Introducing the device that received great acclaim at the MEMS exhibition. It streamlines processes such as polarization treatment, etching, and firing.

Our company offers a range of equipment that plays a vital role in each process of MEMS production, from wafer cleaning to etching, stripping, and inspection. At the "MEMS Sensing & Network System Exhibition 2020," we will showcase products that received significant feedback from visitors. We will introduce equipment that contributes to process efficiency. [Exhibited Products (Partial)] < Piezoelectric MEMS Plasma Polling (Polarization Processing) Equipment > Exhibits excellent uniformity and demonstrates a high polarity effect of up to 90% < Ion Milling Equipment for Piezoelectric and Magnetic Materials > Models capable of processing six 100mm wafers simultaneously are available < High-Power, Short Pulse Control Light Sintering Equipment > Can control the irradiation light in microseconds, heating instantly without damaging the substrate

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Device lineup for MEMS sensing and network devices

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[Other Recommended Products] <Ultrasonic Non-Destructive Defect Inspection Device> A lineup that covers evaluation of joint interfaces in prototypes to full inspection of mass-produced items.

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Data 'MEMS-related Products (Exhibited at MEMS Exhibition 2020)'

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Data 'MEMS-related Products (Not Exhibited at MEMS Exhibition 2020)'

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日立ハイテク

日立ハイテク

Industrial Machinery

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The corporate philosophy aims to be a company that is "trusted" by all stakeholders, and through business activities based on "value creation" using high-tech solutions, it contributes to the progress and development of society. Currently, we are engaged in global business development across five segments: "Electronic Device Systems," "Finetech Systems," "Scientific and Medical Systems," "Industrial and IT Systems," and "Advanced Industrial Materials." We will also organically integrate "trading company functions" and "manufacturing functions" to respond to our customers' needs as an advanced technology company.

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