It is a compact turbo molecular pump that is oil-free and maintenance-free.
This is a high-reliability pump with a ceramic bearing type. Due to the rotor stage and drag stage, it is designed to have a high compression ratio, exhaust speed, and throughput for both N2 and H2. There are two types of controllers: a cost-effective controller for embedded systems and a rack-mounted controller.
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basic information
<Main Specifications> Exhaust Speed: 90 l/s to 450 l/s Ultimate Pressure: 5×10e-8 Pa Flange: ICF, ISO-K Mounting Position: Free Cooling: Natural Air Cooling, Forced Air Cooling, Water Cooling We sell turbo molecular pumps from Leybold, Pfeiffer, Edwards, and Agilent. Please check the catalog and our website for specifications.
Price range
P4
Delivery Time
Applications/Examples of results
【Applications】 ○ Film formation devices ○ Electron microscopes ○ Surface analysis devices ○ Mass spectrometers ○ Accelerators ○ Nuclear fusion experimental devices ○ Semiconductor manufacturing equipment (ion implantation, dry etching, MBE)
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