It is an oil-free compact turbo molecular pump.
It is a high-reliability pump with a ceramic bearing type. Bearing replacement is also possible at the customer's site.
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basic information
<Main Specifications> Exhaust Speed: 84 l/s to 400 l/s Achievable Pressure: 5×10e-8 Pa Flange: ICF, ISO-K Mounting Position: 180° (up to horizontal) Cooling Method: Natural air cooling, forced air cooling, water cooling We sell turbo molecular pumps from Leybold, Pfeiffer, Edwards, and Agilent. Please check the catalog and our website for specifications.
Price range
P4
Delivery Time
Applications/Examples of results
【Applications】 ○ Film formation device ○ Electron microscope ○ Surface analysis device ○ Mass spectrometer ○ Accelerator ○ Nuclear fusion experimental device ○ Semiconductor manufacturing equipment (ion implantation, dry etching, MBE)
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Company information
In companies, the wave of rationalization and labor-saving is advancing with technological revolution, requiring more miniaturization, higher sophistication, and greater diversification. In such an environment, our company is always striving to stay half a step ahead of the changing times, bringing together youth, hard work, and capability. We are passionate about contributing to the development of society as Electronics Marketing Corporation, based on our original ideas, meticulous services, and Excellent Confidence.