It is an oil-free compact turbo molecular pump.
It is a high-performance turbo molecular pump with ceramic bearing type and magnetic levitation type.
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<Main Specifications> Exhaust Speed: 10 l/s to 2,950 l/s Achievable Pressure: 5×10e-8 Pa Flange: ICF, ISO-K, ISO-F Mounting Position: Free Cooling Method: Natural Air Cooling, Forced Air Cooling, Water Cooling We sell turbo molecular pumps from Leybold, Pfeiffer, Edwards, and Agilent. Please check the catalog and our website for specifications.
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Applications/Examples of results
【Applications】 ○ Film formation device ○ Electron microscope ○ Surface analysis device ○ Mass spectrometer ○ Accelerator ○ Nuclear fusion experimental device ○ Semiconductor manufacturing equipment (ion implantation, dry etching, MBE)
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