Vacuum exhaust energy-saving solutions! Application to vacuum facilities in semiconductor device factories.
This document is an introduction to the vacuum centralized exhaust system 'VIE-system' handled by Beck. It includes the current issues with exhaust systems, an introduction to the vacuum centralized exhaust system, and the effects of implementing the VIE-system. Please feel free to download and take a look. 【Contents】 ■ Current exhaust system for the load lock chamber ■ Current exhaust system for the load lock chamber (example) ■ Vacuum centralized exhaust system for the load lock chamber ■ Effects of implementing the VIE-system *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Effects of Introduction】 ■ Enables vacuum exhaust of all load lock chambers with a vacuum server ■ Reduces the number of pumps ■ Decreases pump power consumption ■ The dry pump of the vacuum server operates at full capacity in a low-load pressure range ■ Can be expanded for large-scale and high-vacuum applications *For more details, please refer to the PDF materials or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Download All Catalogs![[Information] Vacuum Concentrated Exhaust System 'VIE-system'](https://image.mono.ipros.com/public/catalog/image/01/bdb/518704/IPROS55891822434221773892.jpeg?w=120&h=170)
Company information
Beck Co., Ltd. is a company that handles products such as the "Eco Back System," which exhausts the reservoir during the idling of vacuum pumps, "glove donning machines" for rubber gloves, and the high-efficiency vacuum system "Vacuum Server." Our company contributes to energy saving and productivity improvement in vacuum equipment.
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