Introducing a simple basic unit for 300mm wafer FOUP and FOSB!
The "FVD-BU" is a vacuum desiccator that can be used for various purposes such as vacuum storage, degassing, drying, and gas replacement while keeping wafers in FOUP/FOSB (with purge port). Wafers can be stored for long periods without being affected by the airtightness of the FOUP. The chamber is compactly sized to match the dimensions of the FOUP. Additionally, it features a damper hinge for smooth opening and closing, making it convenient for inserting and removing FOUPs and similar containers. We also offer an electric type called "FVD-DT." 【Features】 ■ For 300mm wafers in FOUP and FOSB ■ Versatile use for degassing, drying, gas replacement, etc. ■ Long-term storage capability ■ Compact chamber size ■ Top cover with opening and closing mechanism (with damper hinge) *For more details, please refer to the PDF document or feel free to contact us.
Inquire About This Product
basic information
【Other Features】 ■ Can store cassettes and wafers of 8 inches or smaller ■ Spare ports have PT threads on the inner surface ■ It is possible to attach heater nozzles and filters on the chamber side *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
Beck Co., Ltd. is a company that handles products such as the "Eco Back System," which exhausts the reservoir during the idling of vacuum pumps, "glove donning machines" for rubber gloves, and the high-efficiency vacuum system "Vacuum Server." Our company contributes to energy saving and productivity improvement in vacuum equipment.