We clearly present a variety of VGX operations and features!
This document is an introduction to the vacuum gas replacement system for FOUPs, 'VGX-system', handled by Beck Co., Ltd. It includes an overview of the current purging system, methods, issues, an overview of VGX, and numerous VGX operations. Please feel free to download and take a look. 【Contents】 ■ Current Purging System ■ Current Method (1) ■ Current Method (2) ■ Issues with the Current Purging System ■ Overview of VGX *For more details, please refer to the PDF document or feel free to contact us.
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【Other Published Content】 ■VGX Operations (1) – (8) ■Features of the VGX System ■Oxygen Concentration in the FOUP *For more details, please refer to the PDF materials or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Download All Catalogs![[Information] FOUP Vacuum Gas Replacement System 'VGX-system'](https://image.mono.ipros.com/public/catalog/image/01/134/518719/IPROS05153829292713408172.jpeg?w=120&h=170)
Company information
Beck Co., Ltd. is a company that handles products such as the "Eco Back System," which exhausts the reservoir during the idling of vacuum pumps, "glove donning machines" for rubber gloves, and the high-efficiency vacuum system "Vacuum Server." Our company contributes to energy saving and productivity improvement in vacuum equipment.