Ideal for vacuum containing water vapor and water droplets! Introduction to the wafer vacuum system.
The "WVC-750" is a water-sealed vacuum generation device developed for clamping wafer substrates used in semiconductor electronic components. It can be used in conjunction with a water-cooled circulation chiller, operates with low noise and minimal vibration, and achieves stable vacuum for extended periods. The water circulation cooling allows for savings in water consumption and is suitable for vacuuming gases containing water vapor and droplets. 【Features】 - Suitable for vacuuming gases containing water vapor and droplets - Achieves stable vacuum for long periods with low noise and minimal vibration - Saves water consumption through water circulation cooling - Can be used in conjunction with a water-cooled circulation chiller - Strong vacuum power (achieves 5.3Pa×10^3) *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications (Excerpt)】 ■Control Method: PID (ON, OFF Control) ■Vacuum Method: Water-sealed Vacuum Pump Method ■Achievable Vacuum Pressure: 5.3Pa×10^3 ■Power Supply: AC200V 3-phase 50H/60H ■Power Consumption: 25kw ■External Dimensions: W450mm×D700mm×H1400mm ■Weight: Approximately 130kg *For more details, please refer to the PDF document or feel free to contact us.
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[Applications] ■General semiconductor manufacturing equipment ■For grinding machines/lapping/polishing equipment: Wafer vacuum chuck ■For measurement equipment work clamps: Wafer suction/transport, vacuum tweezers ■For vacuum chucks of machine tools *For more details, please refer to the PDF document or feel free to contact us.
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At Femtech Co., Ltd., we mainly handle polishing technology equipment and cleaning/ice screen technology and equipment. By integrating polishing technology and ultra-precision cleaning technology with our extensive proprietary technological assets and the latest elemental technologies, we provide various equipment and materials to the semiconductor and electronic device industries. Please feel free to contact us if you have any inquiries.