It is possible to propose suitable electrostatic chucks according to the objects to be held, their applications, and the environment.
Our company develops, manufactures, and sells electrostatic chucks made from various materials to meet our customers' requirements as a comprehensive electrostatic chuck manufacturer. We understand the environment in which our products will be used and the functions required, and we propose optimal product specifications through our development and design technology. Additionally, we provide high-performance and high-functionality products utilizing advanced manufacturing technology. [Examples of Optional Features] ■ Built-in Heater - By integrating stage substrate manufacturing technology with thin heater manufacturing technology, high-precision temperature control is achievable. ■ High-Temperature Compatibility - By using ALN ceramic as the material for the electrostatic chuck, it can be used in high-temperature environments up to 500°C. ■ Abnormal Discharge Countermeasures - With our know-how, we can implement measures against abnormal discharges that tend to occur around gas holes. *For more details, please refer to the PDF document or feel free to contact us.
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【Examples of Customization Elements (Excerpt)】 ■ Design/Manufacturing <Electrostatic Chuck> - Material: Material (Ceramic/Coating/Resin) etc. - Internal Electrode Pattern: Unipolar, Bipolar etc. - Surface Condition: Surface Shape (Embossed/Flat), Surface Roughness etc. <Stage Substrate> - Material: Resin, Ceramic, Aluminum Alloy, Stainless Alloy etc. - Joining Method: Metallization, Vacuum Soldering, Beam Welding, Diffusion Bonding etc. - Surface Treatment: Anodizing, Thermal Spraying, Plating, Sputtering etc. ■ Inspection - Mechanical Elements: Two-Dimensional Measurement, Three-Dimensional Measurement, He Leak Testing, Water Pressure Testing etc. - Thermal Elements: Thermocouple Temperature Measurement, Thermography etc. - Assembly Validity: Ultrasonic Testing etc. - Functional Diagnosis: Gas Pressure Testing using Test Chamber etc. *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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In 1985, Creative Technology began with the development of processing technology for brittle materials, specifically fine ceramics. In the 1990s, it successfully developed electrostatic chucks for semiconductor manufacturing equipment, based on that processing technology. Furthermore, in the early 2000s, it established a regeneration business for electrostatic chucks, leveraging the development and manufacturing technology it had cultivated, and built connections with customers around the world. Now, we are evolving the technology used in the semiconductor industry into various forms and working on the development of high-value-added electrostatic adhesion application products. Creative Technology contributes to labor-saving and IoT initiatives in various fields through technology that connects objects. If you can provide samples, we also conduct adhesion tests at our company. Please feel free to consult with us.