Contributes to maintaining cleanliness! Used in semiconductor manufacturing equipment and display manufacturing equipment, etc.
The "Polyimide Electrostatic Chuck" generates fewer particles due to wear and contributes to maintaining cleanliness because it has no moving parts. It can grip thin or easily deformable products without applying stress, and when used for transporting wafers or glass, it can operate with power consumption of less than 1W. Additionally, the gripping force is effective not only in the atmosphere but also in a vacuum. It is also adopted in equipment that combines atmospheric and vacuum processes. 【Features】 ■ Clean device ■ Low damage ■ Usable in a vacuum ■ Low power consumption *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Customization Specifications (Options)】 ■Electrode Optimization ■High-Temperature Compatibility ■Surface Treatment ■Maintenance/Repair ■Larger Size, etc. *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Gripping of substrates in semiconductor manufacturing processes and display manufacturing processes (for transportation, bonding, inspection/measurement, temperature control, and others) ■ Gripping of thin and easily deformable products that are difficult to handle with vacuum chucks or Bernoulli chucks (for transportation, bonding, inspection/measurement, temperature control, and others) * For more details, please refer to the PDF materials or feel free to contact us.
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Company information
In 1985, Creative Technology began with the development of processing technology for brittle materials, specifically fine ceramics. In the 1990s, it successfully developed electrostatic chucks for semiconductor manufacturing equipment, based on that processing technology. Furthermore, in the early 2000s, it established a regeneration business for electrostatic chucks, leveraging the development and manufacturing technology it had cultivated, and built connections with customers around the world. Now, we are evolving the technology used in the semiconductor industry into various forms and working on the development of high-value-added electrostatic adhesion application products. Creative Technology contributes to labor-saving and IoT initiatives in various fields through technology that connects objects. If you can provide samples, we also conduct adhesion tests at our company. Please feel free to consult with us.
![[Demo unit available for loan] Multi-material electrostatic chuck](https://image.mono.ipros.com/public/product/image/f44/2000534984/IPROS12259459773540996717.png?w=280&h=280)
