Excellent high purity and corrosion resistance! It demonstrates high performance as a component in semiconductor manufacturing equipment.
"CVD-SiC" is bulk SiC manufactured using the CVD method (chemical vapor deposition). It has high purity, excellent corrosion resistance, and demonstrates high performance as components for semiconductor manufacturing equipment. It has a long lifespan and does not experience issues such as pinholes or delamination in SiC-coated products. Additionally, suitable grades can be selected based on the process. 【Features】 ■ High purity and excellent corrosion resistance ■ Long lifespan ■ Low-resistance and high-resistance grades ■ Suitable grades can be selected based on the process ■ No issues with pinholes or delamination in SiC-coated products *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Characteristics】 ■Color tone: Black ■Density (g/cm3): 3.21 ■Flexural strength (Mpa): 370 ■Thermal conductivity (W/m·K) ・250 (HR) ・220 (ELR) ■Electrical resistivity (Ω·cm) ・>1 (HR) ・<0.1 (ELR) ■Fracture toughness (Mpa/m1/2): 2.94 *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Etcher device components ■ Wafer trays ■ Molds for lens forming *For more details, please refer to the PDF document or feel free to contact us.
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Our Functional Materials Division offers advanced technology services, including materials and equipment utilizing cutting-edge technologies such as nanotechnology, in addition to carbon and graphite products, and specialty ceramic raw materials and products, which were core products of Union Carbide Corporation. Please feel free to contact us if you have any inquiries.