Shapes that are difficult to achieve with ceramics can be produced! A functional material with excellent machinability.
"PG" is graphite manufactured using the CVD method (chemical vapor deposition). It exhibits excellent performance as a component in semiconductor manufacturing equipment and can create shapes that are difficult to achieve with ceramics. Additionally, it has a thermal conductivity comparable to copper and excels in heat dissipation. [Features] ■ High purity and excellent corrosion resistance ■ Excellent machinability ■ High thermal conductivity ■ Capable of producing shapes that are difficult to achieve with ceramics ■ Comparable thermal conductivity to copper, excelling in heat dissipation (in-plane direction) *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Characteristics (Excerpt)】 ■Density (g/cm3): 2.2 ■Bending Strength (MPa): 340 ■Compressive Strength (MPa) ・100 (a direction) ・250 (c direction) ■Thermal Conductivity (W/m·K) ・444 (a direction) ・2.2 (c direction) ※a direction = surface direction, c direction = lamination direction ※For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■ Etching device components ■ Wafer trays ■ Electrodes *For more details, please refer to the PDF document or feel free to contact us.
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Our Functional Materials Division offers advanced technology services, including materials and equipment utilizing cutting-edge technologies such as nanotechnology, in addition to carbon and graphite products, and specialty ceramic raw materials and products, which were core products of Union Carbide Corporation. Please feel free to contact us if you have any inquiries.