Industry-leading basic performance such as compression ratio, achieved vacuum level, and gas flow rate.
This is a gas transfer type mechanical vacuum pump used in applications requiring high vacuum (< 1x 10^-1 Pa), combined with roughing pumps such as rotary pumps. Since it does not use oil on the high vacuum side, a clean vacuum can be achieved. • Specifications can be selected according to the usage environment • Equipped with a drive circuit (models with built-in power supply are also available) Saves installation space, reduces cables, and lowers costs • Drive circuit disconnection type Flexibility in installation environment and space • Automatic recognition of accessories (plug & play) No need for troublesome wiring work • Worldwide service Service support available not only in Japan but also globally
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basic information
Faifa Vacuum Company is headquartered in Aslar, Germany, and has been developing and manufacturing cutting-edge vacuum equipment, vacuum measurement instruments, and vacuum analysis instruments since 1890. The company developed the world's first turbo pump over 50 years ago. Since then, it has continued to innovate and has established itself as a leading company in this field, providing optimal vacuum environments to customers across various sectors, including semiconductors, analysis, coating, industry, and R&D, in countries around the world.
Price range
Delivery Time
※Delivery times may vary depending on the model number and quantity. Please feel free to contact us.
Applications/Examples of results
【Usage】 Analysis equipment Semiconductor devices Accelerators Others
Detailed information
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• Compound turbo molecular pump • Industry-leading exhaust speed, compression ratio, and allowable gas flow rate • Free installation orientation • Complies with various standards: RoHS, CE, UL (partially), Semi • Dustproof and waterproof standard IP54 compliant
Line up（24）
| Model number | overview |
|---|---|
| HiPace10 | •Exhaust speed N2: 10 l/s, H2: 3.7 l/s •Achievable vacuum level: <5.0×10-3 Pa ※Without baking •Diameter: 25KF/NW25 |
| HiPace30 | •Exhaust speed N2: 22~32 l/s, H2: 19~20 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 40KF/NW40, 63ISO-K, 63CF/ICF114 |
| HiPace80 | •Exhaust speed N2: 35~67 l/s, H2: 38~48 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 40KF/NW40, 63ISO-K, 63CF/ICF114 |
| HiPace300 | •Exhaust speed N2: 260~370 l/s, H2: 220~460 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 100 ISO-K, 100CF/ICF152, 100 ISO-F |
| HiPace300H | •H model is a high compression ratio model •Exhaust speed N2: 260~370 l/s, H2: 220~460 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 100 ISO-K, 100CF/ICF152, 100 ISO-F |
| HiPace300P | •P model is designed for processes that generate dust, etc. •Exhaust speed N2: 245 l/s, H2: 125 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 100 ISO-K, 100CF/ICF152, 100 ISO-F |
| HiPace300M | •M model is a five-axis controlled magnetic levitation turbo molecular pump •Exhaust speed N2: 255 l/s •Achievable vacuum level: <5.0×10-8 Pa •Diameter: 100 ISO-K, 100CF/ICF152, 100 ISO-F |
| HiPace400 | •Exhaust speed N2: 260~370 l/s, H2: 220~460 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 100 ISO-K, 100CF/ICF152, 100 ISO-F |
| HiPace400P | •P model is designed for processes that generate dust, etc. •Exhaust speed N2: 350 l/s, H2: 225 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 100 ISO-K, 100CF/ICF152, 100 ISO-F |
| HiPace700 | •Exhaust speed N2: 685 l/s, H2: 555 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 160 ISO-K, 160CF-F/ICF203, 160 ISO-F |
| HiPace700H | •H model is a high compression ratio model •Exhaust speed N2: 685 l/s, H2: 555 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 160 ISO-K, 160CF-F/ICF203, 160 ISO-F |
| HiPace700P | •P model is designed for processes that generate dust, etc. •Exhaust speed N2: 670 l/s, H2: 275 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 160 ISO-K, 160CF/ICF203, 160 ISO-F |
| HiPace700M | •M model is a five-axis controlled magnetic levitation turbo molecular pump •Exhaust speed N2: 685 l/s •Achievable vacuum level: <5.0×10-8 Pa •Diameter: 160 ISO-K, 160CF-F/ICF203, 160 ISO-F |
| HiPace800 | •Exhaust speed N2: 790 l/s, H2: 580 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 200 ISO-K, 200CF/ICF253, 200 ISO-F |
| HiPace800P | •P model is designed for processes that generate dust, etc. •Exhaust speed N2: 785 l/s, H2: 320 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 200 ISO-K, 200CF/ICF253, 200 ISO-F |
| HiPace800M | •M model is a five-axis controlled magnetic levitation turbo molecular pump •Exhaust speed N2: 790 l/s •Achievable vacuum level: <5.0×10-8 Pa •Diameter: 200 ISO-K, 200CF/ICF253, 200 ISO-F |
| HiPace1200 | •Exhaust speed N2: 1250 l/s, H2: 1100 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 200ISO-K, 200CF/ICF253, 200ISO-F |
| HiPace1200C | •C model is a corrosion-resistant model •Exhaust speed N2: 1250 l/s, H2: 1100 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 200ISO-K, 200CF/ICF253, 200ISO-F |
| HiPace1500 | •Exhaust speed N2: 1400 l/s, H2: 1150 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 250ISO-K, 250CF/ICF303, 250ISO-F |
| HiPace1500C | •C model is a corrosion-resistant model •Exhaust speed N2: 1400 l/s, H2: 1150 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 250ISO-K, 250CF/ICF303, 250ISO-F |
| HiPace1800 | •Exhaust speed N2: 1450 l/s, H2: 1700 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 200ISO-K, 200ISO-F |
| HiPace1800C | •C model is a corrosion-resistant model •Exhaust speed N2: 1450 l/s, H2: 1700 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 200ISO-K, 200CF/ICF253, 200ISO-F |
| HiPace2300 | •Exhaust speed N2: 1900 l/s, H2: 1850 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 250ISO-K, 250CF/ICF303, 250ISO-F |
| HiPace2300C | •C model is a corrosion-resistant model •Exhaust speed N2: 1900 l/s, H2: 1850 l/s •Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape •Diameter: 250ISO-K, 250CF/ICF303, 250ISO-F |
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Company information
Hakuto Co., Ltd. is a trading company specializing in electronics and providing technical services as a technology trading company and a manufacturer of chemical industrial products, creating a rich future where people and technology coexist by identifying individual needs. Our company was established in November 1953 as a trading company engaged in the import and sale of quartz crystals. The name "Hakuto" is derived from the first character of "Brazil," the origin of quartz, and "Tokyo," representing the east. This name embodies our strong desire to grow as an international trading company that connects not only Brazil and Tokyo but also the wider world. 【Manufacturers/Products Listed on Ipros】 Asahi Kasei / Sensors, Hall elements, ICs Crystal IS / UVC (Deep Ultraviolet) LEDs IMPINJ / RAIN RFID devices, systems, software