Turbo molecular pump exhaust system HiCube series

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HiCube series by Faifer Vacuum Company

last updated：Apr 18, 2022

伯東本社

Turbo molecular pump and roughing pump can be driven simultaneously with a single switch.

• Overwhelming achievements in research institutions such as universities and government agencies • Industry-leading basic performance → Compression ratio, achieved vacuum level, gas flow rate, etc. • Turbo molecular pump and roughing pump can be simultaneously operated with a single switch • Monitoring of Pfeiffer Vacuum's vacuum gauge possible with the attached controller • Automatic recognition of accessories (plug & play) → No need for cumbersome wiring work • Worldwide service → Service available not only in Japan but also globally • Detachment of the turbo molecular pump from the unit is possible (optional) ⇒ Reduction of evacuation time

Inquire About This Product

basic information

Faifa Vacuum Company is headquartered in Asler, Germany, and has been developing and manufacturing cutting-edge vacuum equipment, vacuum measurement instruments, and vacuum analysis instruments since 1890. The company developed the world's first turbo pump over 50 years ago. Since then, it has advanced technological innovation and, as a leading company in this field, provides optimal vacuum environments to customers across various sectors worldwide, including semiconductors, analysis, coating, industry, and R&D.

Price range

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Delivery Time

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※Delivery times may vary depending on the model number and quantity. Please feel free to contact us.

Applications/Examples of results

【Applications】 Cryostat Accelerators and synchrotron facilities Analytical instruments (probers, sample purification, etc.) Various vacuum devices (vacuum furnaces, gas replacement, etc.)

Detailed information

• Overwhelming achievements in research institutions such as universities and government agencies • Industry-leading basic performance → Compression ratio, achieved vacuum level, gas flow rate, etc. • Turbo molecular pump and roughing pump can be simultaneously operated with a single switch • Monitoring of Pfeiffer Vacuum's vacuum gauge possible via the attached controller • Automatic recognition of accessories (plug & play) → No need for cumbersome wiring work • Worldwide service → Service support available not only in Japan but globally • Ability to disconnect the turbo molecular pump from the unit (optional) ⇒ Reduction in evacuation time

Line up（16）

Model number	overview
HiCube30 Eco	• Exhaust speed N2: 22~32 l/s • Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking • Inlet: 40ISO-KF(NW40), 63ISO-K, 63CF(ICF114)
HiCube80 Eco	• Exhaust speed N2: 35~67 l/s • Achievable vacuum level: <1.0×10-5 ~ <1.0×10-6 Pa ※Depends on baking and flange shape • Inlet: 40ISO-KF(NW40), 63ISO-K, 63CF(ICF114)
HiCube80 Classic	• Exhaust speed N2: 35~67 l/s • Achievable vacuum level: <1.0×10-5 ~ <5.0×10-8 Pa ※Depends on baking and flange shape • Inlet: 40ISO-KF(NW40), 63 ISO-K, 63CF(ICF114)
HiCube80 Pro	• Exhaust speed N2: 35~67 l/s • Achievable vacuum level: <1.0×10-5 ~ <5.0×10-8 Pa ※Depends on baking and flange shape • Inlet: 40ISO-KF(NW40), 63ISO-K, 63CF(ICF114)
HiCube300 Eco	• Exhaust speed N2: 260 l/s • Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape • Inlet: 100 ISO-K, 100CF(ICF152)
HiCube300 Classic	• Exhaust speed N2: 260 l/s • Achievable vacuum level: <1.0×10-5 ~ <5.0×10-8 Pa ※Depends on baking and flange shape • Inlet: 100ISO-K, 100CF(ICF152)
HiCube300 Pro	• Exhaust speed N2: 260 l/s • Achievable vacuum level: <1.0×10-5 ~ <5.0×10-8 Pa ※Depends on baking and flange shape • Inlet: 100ISO-K, 100CF(ICF152)
HiCube300H Eco	• Exhaust speed N2: 260 l/s • Achievable vacuum level: <1.0×10-5 ~ <1.0×10-6 Pa ※Depends on baking and flange shape • Inlet: 100 ISO-K, 100CF(ICF152)
HiCube300H Classic	• Exhaust speed N2: 260 l/s • Achievable vacuum level: <1.0×10-5 ~ < 1.0×10-8 Pa ※Depends on baking and flange shape • Inlet: 100ISO-K, 100CF(ICF152)
HiCube300H Pro	• Exhaust speed N2: 22~32 l/s, H2: 19~20 l/s • Achievable vacuum level: <1.0×10-5 Pa ※Depends on baking and flange shape • Inlet: 40ISO-KF(NW40), 63ISO-K, 63CF/ICF114
HiCube400 Classic	• Exhaust speed N2: 355 l/s • Achievable vacuum level: <1.0×10-5 ~ <5.0×10-8 Pa ※Depends on baking and flange shape • Inlet: 100ISO-K, 100CF(ICF152)
HiCube400 Pro	• Exhaust speed N2: 355 l/s • Achievable vacuum level: <1.0×10-5 ~ <5.0×10-8 Pa ※Depends on baking and flange shape • Inlet: 100ISO-K, 100CF(ICF152)
HiCube700 Classic	• Exhaust speed N2: 685 l/s • Achievable vacuum level: <1.0×10-5 ~ <5.0×10-8 Pa ※Depends on baking and flange shape • Inlet: 160 ISO-K, 160CF(ICF203)
HiCube700 Pro	• Exhaust speed N2: 685 l/s • Achievable vacuum level: <1.0×10-5 ~ <5.0×10-8 Pa ※Depends on baking and flange shape • Inlet: 160 ISO-K, 160CF(ICF203)
HiCube700H Classic	• Exhaust speed N2: 685 l/s • Achievable vacuum level: <1.0×10-5 ~ < 1.0×10-8 Pa ※Depends on baking and flange shape • Inlet: 160 ISO-K, 160CF(ICF203)
HiCube700H Pro	• Exhaust speed N2: 685 l/s • Achievable vacuum level: <1.0×10-5 ~ < 1.0×10-8 Pa ※Depends on baking and flange shape • Inlet: 160 ISO-K, 160CF(ICF203)