Equipped with a substrate driving mechanism, it is capable of rotating, swiveling, and moving the substrate horizontally! The heating heater uses carbon material.
The "Ceramic Coating Device" is a device that coats substrates with ceramic in a high vacuum state. It can raise the chamber temperature to nearly 1200°C. Additionally, a significant feature is that it is equipped with a substrate drive mechanism, allowing the substrate to rotate, pivot, and move horizontally. An electron gun (JEOL 16KW electron gun) is used as the evaporation source, and the crucible section can be controlled for elevation and rotation to accommodate ingot-shaped evaporation materials. For film formation control, it has a shutter mechanism, and it is also possible to set the opening and closing time and the number of repetitions for the motion. 【Features】 ■ Coats substrates with ceramic in a high vacuum state ■ Can raise the chamber temperature to nearly 1200°C ■ Equipped with a substrate drive mechanism, allowing for rotation, pivoting, and horizontal movement of the substrate ■ Uses an electron gun (JEOL 16KW electron gun) as the evaporation source ■ The crucible section can be controlled for elevation and rotation to accommodate ingot-shaped evaporation materials *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 - It has a shutter mechanism for film formation control, and it can also set the opening and closing time as well as the number of repetitions. - The heating heater is made of carbon and does not react to gas types. *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Founded in 1995, we are a vacuum equipment manufacturer. For over 25 years, we have been designing and manufacturing "customized equipment tailored to individual needs," focusing on various thin film devices, heat treatment furnaces, melting furnaces, and drying furnaces. We will propose solutions based on your requests, so please let us know your needs "in full."