Ideal for high-precision positioning of measuring instruments and similar equipment! Made of ceramics and featuring a completely non-contact guide, it is maintenance-free and can be used for a long time!
The Ceramic Air Slide RC series is a completely non-contact guide using air static pressure. Unlike LM guides and cross guides, it does not generate vibrations from rolling, resulting in extremely low sliding resistance and enabling high-speed movement. Additionally, it maintains a small posture accuracy (pitching and yawing) value, ensuring high straightness, making it ideal for stages of devices that require high-precision motion, such as measuring instruments and semiconductor manufacturing equipment. By using alumina ceramics with excellent rigidity, there is almost no aging deterioration, and lubrication with oil or grease is unnecessary, allowing for maintenance-free use for a semi-permanent period.
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basic information
Ceramic Air Slide RC Series Stroke: 25mm, 50mm, 100mm Stiffness: Up/Down 1.0–4.0kgf/μm / Left/Right 0.8–3.0kgf/μm Maximum Load Capacity: 2–8kgf Straightness: Up/Down 0.1–0.2μm/stroke / Left/Right 0.1–0.2μm/stroke (*) Pitching: 0.01–0.18μm Yawing: 0.01–0.09μm (*) These are reference measurement values under no load. We offer 6 types of models. Please download the catalog for specifications of each model.
Price range
Delivery Time
Applications/Examples of results
■High-precision positioning of measuring instruments ■High-precision positioning of semiconductor manufacturing equipment Ideal for stages of devices that require high-speed and high-precision operation.
Line up（6）
| Model number | overview |
|---|---|
| 2RC025 | Stroke 25mm |
| 2RC050 | Stroke 50mm |
| 2RC100 | Stroke 100mm |
| 3RC025 | Stroke 25mm |
| 3RC050 | Stroke 50mm |
| 3RC100 | Stroke 100mm |
catalog（2）
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Company information
In September 1991, PMT Corporation was founded as a general trading company for semiconductor manufacturing equipment. Since then, after processing parts and designing and manufacturing molds, we established ultra-precision axis control technology. We have leveraged this as our strength and applied it to various machines and devices, including the nano-stage system, NC fine processing machines, and maskless exposure devices. Currently, we are also engaged in automation systems specialized for the life sciences sector and robotics projects that solve challenges in manufacturing sites, continuing to create products that transcend industry boundaries. Our motto is, "What shall we create with PMT?" Please let us know your requests first.