Palm-sized nano stage. With this small size and thinness, positioning on the nanometer order is possible.
The nano-UP series is a compact nano stage that achieves extremely high control resolution and repeatability by incorporating a high-precision feedback scale and piezo actuators. By rapidly switching between a stepping motor (for coarse movement) and piezo (for fine movement), it enables smooth positioning at the nano order. The lineup includes three types and four models: a single-axis stage, a theta stage, and an inclined stage, which can be freely combined according to your application needs. We also welcome inquiries regarding customization, so please feel free to consult with us.
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■Combination Examples ・X-Y Stage By stacking two 1-axis stages, you can create a super compact X-Y stage that allows for movement in two directions. Each unit is approximately 25mm thick, enabling multiple units to be stacked for use. ・θ-Inclination (X-Y) Stage A combination of θ and inclination stages. This setup is ideal for applications requiring precise angle control, such as optical axis adjustment.
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With its small size and thinness that fits in the palm of your hand, this stage is ideal for applications requiring precise positioning, such as adjusting the laser beam axis and aligning lenses.
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In September 1991, PMT Corporation was founded as a general trading company for semiconductor manufacturing equipment. Since then, after processing parts and designing and manufacturing molds, we established ultra-precision axis control technology. We have leveraged this as our strength and applied it to various machines and devices, including the nano-stage system, NC fine processing machines, and maskless exposure devices. Currently, we are also engaged in automation systems specialized for the life sciences sector and robotics projects that solve challenges in manufacturing sites, continuing to create products that transcend industry boundaries. Our motto is, "What shall we create with PMT?" Please let us know your requests first.