Introducing the next-generation rectangular gate valve to accommodate miniaturized semiconductor processes!
The "True L-Motion Gate Valve" is a next-generation rectangular gate valve with low vibration. In addition to reducing vibration during OPEN/CLOSE operations, it also achieves low particle generation through a new mechanism. Options are available for changing seal materials and adding surface treatments. 【Features】 ■ Compatible with miniaturizing semiconductor processes ■ Low vibration: Achieves low vibration during OPEN/CLOSE operations ■ Low particle generation: Achieves low particle generation through a new mechanism *For more details, please refer to the PDF document or feel free to contact us.
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【Options】 ■Change of seal material ■Addition of surface treatment *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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"We will contribute to the development of the IT and high-tech industries." Since our establishment, we have consistently developed and produced specialized valves in various fields. Thanks to this, our vacuum valves, used in the IT sector—particularly in the manufacturing of semiconductors, FPDs (liquid crystal and organic EL panels), thin-film solar panels, and hard disks—have gained strong trust from users as clean valves and have grown to be widely adopted. Additionally, as the only rupture disk manufacturer in Japan, we have a wealth of achievements and receive high evaluations from our customers. Moving forward, we will globally engage in the development of higher-performance products, enhance our product offerings to meet customer and market needs, strengthen our manufacturing and sales both domestically and internationally, and further improve our after-sales service system to contribute to the development of the industry.