Supports large-sized FPD substrates (G11)! A rectangular gate valve that achieves non-sliding for both horizontal transport.
The "Gate valve T-Motion" is a rectangular gate valve that can be configured freely by equipment designers without the constraints of valve size (width × height). Thanks to its unique valve motion, it achieves low vibration without reducing the opening and closing speed. By standardizing components beyond valve sizes, it has become a cost-effective product. 【Features】 ■ Low vibration ■ Low particle generation ■ Low cost ■ Matches various generations ■ Compatible with larger FPD substrates (G11) *For more details, please refer to the PDF document or feel free to contact us.
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【Options】 ■Change of seal material ■Addition of surface treatment *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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"We will contribute to the development of the IT and high-tech industries." Since our establishment, we have consistently developed and produced specialized valves in various fields. Thanks to this, our vacuum valves, used in the IT sector—particularly in the manufacturing of semiconductors, FPDs (liquid crystal and organic EL panels), thin-film solar panels, and hard disks—have gained strong trust from users as clean valves and have grown to be widely adopted. Additionally, as the only rupture disk manufacturer in Japan, we have a wealth of achievements and receive high evaluations from our customers. Moving forward, we will globally engage in the development of higher-performance products, enhance our product offerings to meet customer and market needs, strengthen our manufacturing and sales both domestically and internationally, and further improve our after-sales service system to contribute to the development of the industry.