A vacuum valve suitable for processes that require uniform gas flow.
The "Equalizer Control Valve" is a vacuum valve that allows for pressure control. It can be installed with the exhaust pump on the inside, contributing to space-saving and is suitable for processes that require uniform gas flow. We provide custom valves that meet your requirements, including delivery time and budget. Please let us know your needs regarding opening size, pressure, fluid used, temperature, and more. 【Features】 ■ Capable of pressure control ■ Suitable for processes that require uniform gas flow ■ Contributes to space-saving by allowing the exhaust pump to be installed on the inside *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications】 ■Leak rate: 1.0×10^-10 (Pa·m³/s) *Without surface treatment ■Opening size: 350mm ■Drive method: Stepper motor ■Seal material: FKM *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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"We will contribute to the development of the IT and high-tech industries." Since our establishment, we have consistently developed and produced specialized valves in various fields. Thanks to this, our vacuum valves, used in the IT sector—particularly in the manufacturing of semiconductors, FPDs (liquid crystal and organic EL panels), thin-film solar panels, and hard disks—have gained strong trust from users as clean valves and have grown to be widely adopted. Additionally, as the only rupture disk manufacturer in Japan, we have a wealth of achievements and receive high evaluations from our customers. Moving forward, we will globally engage in the development of higher-performance products, enhance our product offerings to meet customer and market needs, strengthen our manufacturing and sales both domestically and internationally, and further improve our after-sales service system to contribute to the development of the industry.