A butterfly valve with a simple structure that can be installed in the vacuum exhaust line of semiconductor vacuum equipment!
The "IVWF Series" is a shut-off valve with a simple structure that can be installed in the vacuum exhaust line of semiconductor vacuum equipment. Its simple design features compactness and lightweight, making valve installation easy. The structure of the throttle valve allows for reproducibility of the opening degree through the scale of the micrometer handle, and fine adjustments can be made using a differential screw mechanism. 【Features】 ■ Compact and lightweight ■ Easy valve installation ■ Solves installation space issues with minimal spacing dimensions ■ Can be set to any opening degree with fixed screws ■ Allows for fine adjustments using a differential screw mechanism *KITZ SCT offers various solutions for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.
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【Main Specifications (Partial)】 ■ Size: 25A, 50A, 80A, 100A ■ Orifice (mm): φ33, φ51.3, φ78, φ100 ■ Valve seat pressure differential: 0.101MPa (forward and reverse pressure) ■ Operating fluid temperature range: -15 to 100℃ ■ Operating durability: 100,000 cycles under atmospheric conditions *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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KITZ SCT combines a wide range of technologies, including metal processing and welding techniques, a spacious and clean environment, ultra-precision cleaning systems, and uniquely developed ultra-precision polishing technology, to develop, manufacture, and provide sales services for various piping components used in semiconductor manufacturing, from vacuum to high-pressure systems. Additionally, we incorporate strict quality control systems, including ISO standards and high-pressure gas certification, aiming for comprehensive cleanliness through all analyses and evaluations from material analysis to process/final products, always responding to the needs of the times.