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  6. NM Motor HR Series Equipped, Standard Stage

NM Motor HR Series Equipped, Standard Stage

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last updated:Jun 14, 2024

工苑
工苑
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Equipped with the HR series ultrasonic motor, we offer standard stages for single-axis and multi-axis motion stages.

Nanomotion's standard stages provide single-axis and multi-axis motion performance for a wide range of applications in the semiconductor, biomedical, and measurement instrument markets.

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NM Motor HR Series Equipped, Standard Stage

goni1.jpg
goni1.jpg
  • Related Link - https://www.koenn.co.jp/nano/stage.html

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basic information

Nanomotion's standard stages are driven by HR motors (Nanomotion's ultrasonic motors) and consist of closed-loop servo motion equipped with optical encoders. The modular design allows for easy installation using standard angle brackets. All axes utilize precision cross roller bearings with high rigidity and optical encoders, enabling precise positioning. The standard stages are classified as follows: - FB Linear Stage - FR Rotary Stage - FG Goniometer Stage - FZ Wedge Stage These stages are available in standard atmospheric models, ISO Class 3 cleanroom-compatible models, and vacuum models. Additionally, we offer custom solutions for applications that are not suitable for standard stages. Please feel free to consult with us.

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Applications/Examples of results

【Applications】 ■Semiconductors, biomedical, and measurement instruments *For more details, please refer to the PDF document or feel free to contact us.

catalog(5)

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Standard stage optimized for HR motors.

Standard stage optimized for HR motors.

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Ultrasonic Motor "HR Series"

Ultrasonic Motor "HR Series"

PRODUCT
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"AB" Driver Series

"AB" Driver Series

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Achievements and Case Studies: "Rotating Stage for Analysis in Synchrotron Radiation Facilities"

Achievements and Case Studies: "Rotating Stage for Analysis in Synchrotron Radiation Facilities"

TECHNICAL
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Nano Motion: A clean and stable 1nm motion system.

Nano Motion: A clean and stable 1nm motion system.

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News about this product(3)

SEMICON_2023_KOENN

Notice of Participation in SEMICON Japan 2023【Kouen】

  • Seminar・Event

Kouen will be exhibiting at "SEMICON Japan 2023" held at Tokyo Big Sight. At this exhibition, we will showcase and demonstrate ultrasonic motors from Nanomotion, which achieve both high-speed movement and precise positioning, along with stage systems that utilize these motors. These are ideal for stages incorporated into semiconductor manufacturing and inspection equipment. In addition to ultrasonic motors, we also offer consultations on the design and manufacturing of stages that can shorten development time. Please take a look at the ultrasonic motors (piezo motors) from Nanomotion, which has over 20 years of delivery experience in semiconductor manufacturing equipment and engineering testing and analysis instruments, along with the range of stage products equipped with them. [Exhibited Products] ■ Ultrasonic Motor (Piezo Motor) "HR Motor" (Demo available) ■ 4-axis stage for ion beam ■ 5-axis stage for light sheet microscopy (Demo available) If you plan to attend, please register in advance using the link below.

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JASIS2023_KOENN

Notice of Participation in 'JASIS 2023' from September 6 (Wednesday) to September 8 (Friday), 2023

  • Seminar・Event

We will be exhibiting at the "JASIS 2023 Advanced Science and Analysis Systems & Solutions Exhibition" held at Makuhari Messe from September 6 (Wednesday) to September 8 (Friday), 2023. At this exhibition, we will primarily showcase our high-precision positioning stage driven by ultrasonic motors. The ultrasonic motors (piezo motors) from our manufacturer, Nanomotion, have over 20 years of delivery experience in semiconductor manufacturing equipment and engineering testing and analysis instruments. We will also demonstrate domestically produced optical shutters. 【Exhibited Products】 ■ Ultrasonic Motor (Piezo Motor) "SE Motor" ■ Ultrasonic Motor (Piezo Motor) "HR Motor" (with demonstration) ■ Optical Shutter (with demonstration) We sincerely look forward to your visit.

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SEMICON_2022_KOENN

Notice of participation in "SEMICON Japan 2022" from December 14 (Wednesday) to December 16 (Friday), 2022.

  • Seminar・Event

We will be exhibiting at "SEMICON Japan 2022," which will be held at Tokyo Big Sight from December 14 (Wednesday) to December 16 (Friday), 2022. At this exhibition, we will showcase SE motors designed for equipment requiring an accuracy of 1nm. Additionally, a technical representative from Nanomotion will be available at our booth to provide explanations. Please take the opportunity to experience the ultrasonic motors (piezo motors) from Nanomotion, which has over 20 years of delivery experience in semiconductor manufacturing equipment and engineering testing and analysis instruments, along with the range of stage products equipped with these motors. [Exhibited Products] ■ Ultrasonic Motor (Piezo Motor) "SE Motor" (Demo available) ■ Ultrasonic Motor (Piezo Motor) "HR Motor" (Demo available) We sincerely look forward to your visit.

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Companynews list (11)

Company information

工苑

工苑

Industrial Electrical Equipment

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A workshop skilled in servo control. ○ In hydraulic servo control, we design and manufacture control devices, create control software, and collaborate with partner companies to design and produce optimal hydraulic units and hydraulic cylinders. We also select components such as hydraulic servo valves. ○ High-speed movement and high-precision positioning using ultrasonic motors. ○ Utilization in robots and unmanned transport vehicles with drivers for servo motors. ○ Controllers and control devices for construction machinery developed through contract development. ○ Creating moving objects such as hydraulic robots and designing and manufacturing 2-axis or 6-axis motion bases through industry-academia collaboration.

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