Equipped with the HR series ultrasonic motor, we offer standard stages for single-axis and multi-axis motion stages.
Nanomotion's standard stages provide single-axis and multi-axis motion performance for a wide range of applications in the semiconductor, biomedical, and measurement instrument markets.
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basic information
Nanomotion's standard stages are driven by HR motors (Nanomotion's ultrasonic motors) and consist of closed-loop servo motion equipped with optical encoders. The modular design allows for easy installation using standard angle brackets. All axes utilize precision cross roller bearings with high rigidity and optical encoders, enabling precise positioning. The standard stages are classified as follows: - FB Linear Stage - FR Rotary Stage - FG Goniometer Stage - FZ Wedge Stage These stages are available in standard atmospheric models, ISO Class 3 cleanroom-compatible models, and vacuum models. Additionally, we offer custom solutions for applications that are not suitable for standard stages. Please feel free to consult with us.
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【Applications】 ■Semiconductors, biomedical, and measurement instruments *For more details, please refer to the PDF document or feel free to contact us.
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Company information
A workshop skilled in servo control. ○ In hydraulic servo control, we design and manufacture control devices, create control software, and collaborate with partner companies to design and produce optimal hydraulic units and hydraulic cylinders. We also select components such as hydraulic servo valves. ○ High-speed movement and high-precision positioning using ultrasonic motors. ○ Utilization in robots and unmanned transport vehicles with drivers for servo motors. ○ Controllers and control devices for construction machinery developed through contract development. ○ Creating moving objects such as hydraulic robots and designing and manufacturing 2-axis or 6-axis motion bases through industry-academia collaboration.