Achieving high-precision on-machine measurement and inline evaluation through vertical scanning low-coherence interferometry!
The "smartWLI series" is a three-dimensional surface profiler (white light interferometer, optical three-dimensional surface shape and roughness meter) that utilizes vertical scanning low-coherence interferometry (CSI) developed by GBS Corporation. The optical three-dimensional surface profiler can non-contact measure surface characteristics such as unevenness, scratches, and seams in the manufacturing processes and quality inspections of precision machined parts like lens molds, automotive parts, electronic components, and functional materials. The vertical scanning low-coherence interferometry (CSI), which is the international standard for three-dimensional surface profile measurement ISO25178-6 (domestic standard JIS B0681-6), features high vertical (unevenness) sensitivity that is independent of the observation field (magnification of the interference objective lens). The "smartWLI series" includes measuring instruments required for inline inspection in manufacturing environments, on-machine measurement of large objects, and measurement of the inner walls of engine cylinders. Additionally, the industry-standard analysis software MountainsMap(R) is adopted.
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basic information
【Overview of GBS Corporation】 ● Established in 1997 as a spin-off from the Data Processing Technology Research Institute ZBS at Ilmenau University of Technology (Germany), which was founded in 1994. ● In 2008, began manufacturing optical measurement equipment for white light interference, specifically optical 3D surface profilers. ● Over 200 automated systems have been introduced worldwide. ● Multiple implementations at Daimler in Germany, and collaboration with the honing manufacturer Gehring. 【Product Features】 ■ Achieves high throughput through the adoption of GPUs (such as NVIDIA). ■ Options for high-resolution cameras (5M) and high-speed cameras (170Hz). ■ Utilizes the industry-standard analysis software MountainsMap® (Digital Surf). ■ Piezo scan model has a vertical resolution of less than 0.1nm (nanoscan is 0.03nm). ■ Piezo scan model with a scanning length of 400μm and a scan speed of Max 250μm/s (compact, extended). ■ Motor scan model with a scanning length of 5mm (extended range). ■ High-resolution model (nanoscan) achieving a sampling interval of 10nm. * For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Measurement Example】 ■SiC Polished Surface *For more details, please refer to the PDF document or feel free to contact us.
Line up(5)
Model number | overview |
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smartWLI nanoscan | Lightweight compact high-resolution model |
smartWLI next | General-purpose model with electric turret |
smartWLI extended | General-purpose model with manual turret |
smartWLI extended range | Lightweight compact model (motor scan) |
smartWLI compact | Lightweight compact model (piezo scan) |
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Company information
The Canon Group is a global company that operates a wide range of businesses around the world. As a part of this group, Canon Marketing Japan Group is responsible for marketing activities and solution proposals primarily in Japan. We strive to maximize customer value by having each employee act as a close presence to our customers, practicing "customer-centricity" and "participation in manufacturing."