The unique cooling water pathway allows the entire magnetron to be cooled at a constant temperature at all times.
We handle the rectangular type 'IONIX® Magnetron Sputter Source'. It can be installed both internally and externally. Thanks to its unique cooling water pathway, the entire magnetron can be cooled to a constant temperature at all times. Additionally, it supports KF, ISO, and CF connections, and with its unique magnetic pole arrangement, it is compatible with the UMBS configuration. 【Features】 ■ Constant temperature cooling for the entire unit ■ Installable both internally and externally ■ Supports KF, ISO, and CF connections ■ Compatible with UMBS configuration due to unique magnetic pole arrangement ■ Cooling structure that does not put stress on the target, preventing deformation of the target *For more details, please refer to the PDF document or feel free to contact us.
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【Features of the Clamp Target】 ■ Target replacement without opening the cooling and vacuum seal ■ Power density increased up to 20W/cm2 ■ Properly secures the target ■ Closely connects the target and the plate *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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At For You Co., Ltd., we offer spectrometers, plasma emission monitors, and emission analysis software. We handle PLASUS products and the emission wavelength identification and analysis software 'SpecLine,' so please feel free to consult us if you have any requests.