By connecting between the electrostatic chuck and the control power supply, it is possible to continuously monitor the state of the electrostatic chuck and the object.
The "Adsorption Monitor Unit" from Creative Technology is a tool that allows for constant monitoring of the adsorption state between an electrostatic chuck and the target object by detecting capacitance. Without modifying the electrostatic chuck or power supply, it can be easily connected between the electrostatic chuck and the power supply to provide sensor functionality to the electrostatic chuck. 【Features】 ■ Constant monitoring of the adsorption state of the target object ■ Detection of unexpected malfunctions ■ Easy installation *For more details, please refer to the PDF document or feel free to contact us.
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basic information
[Recommended Cases for Adsorption Monitor Unit] ■ When you want to continuously monitor the adsorption state of the electrostatic chuck ■ When you want to equip the electrostatic chuck with sensor functionality *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Application Examples】 ■ Continuous monitoring of electrostatic chucks ■ Detection of unexpected malfunctions ■ Easy communication with production equipment *For more details, please refer to the PDF document or feel free to contact us.
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Company information
In 1985, Creative Technology began with the development of processing technology for brittle materials, specifically fine ceramics. In the 1990s, it successfully developed electrostatic chucks for semiconductor manufacturing equipment, based on that processing technology. Furthermore, in the early 2000s, it established a regeneration business for electrostatic chucks, leveraging the development and manufacturing technology it had cultivated, and built connections with customers around the world. Now, we are evolving the technology used in the semiconductor industry into various forms and working on the development of high-value-added electrostatic adhesion application products. Creative Technology contributes to labor-saving and IoT initiatives in various fields through technology that connects objects. If you can provide samples, we also conduct adhesion tests at our company. Please feel free to consult with us.
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