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  6. Wide Range Ionization Vacuum Gauge 'M-833HG'

Wide Range Ionization Vacuum Gauge 'M-833HG'

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last updated:Jan 20, 2023

キヤノンアネルバ 栗木本社
キヤノンアネルバ 栗木本社
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Ideal for high vacuum to ultra-high vacuum equipment! Capable of mounting up to 4 optional boards, offering excellent expandability.

The "M-833HG" is a control unit specifically designed for miniature B-A gauges. An expansion board is available as an option to support various gauges, data output, and more. By combining the miniature B-A gauge with the TC gauge (optional) and incorporating an auto-filament for automatic gauge switching, it enables high-precision vacuum measurement from atmospheric pressure to ultra-high vacuum. 【Features】 ■ Easy-to-read LCD display format ■ Pressure and various messages displayed on the LCD ■ Pressure range automatically switches ■ Complete remote control possible with rich external control functions ■ Standard equipped with 2 set points *For more details, please refer to the PDF document or feel free to contact us.

    Vacuum Equipment
2000607465.JPG

Wide Range Ionization Vacuum Gauge 'M-833HG'

2000607465.JPG
2000607465.JPG
  • Related Link - https://anelva.canon/business/component/vac_detail…

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【Specifications (Excerpt)】 ■ Pressure display range: 0.1×10^-7 to 1.32×10^1 Pa ■ Pressure display: Automatic range switching ■ Set points: 2 points standard equipped (open collector) ■ Dimensions (mm): H99×W209×D330 ■ Weight: 1.9 kg (without optional board) ■ Emission current: Automatic switching setting or fixed setting for 10μA, 100μA, 1mA ■ Standard configuration: Vacuum gauge main unit (measurement sphere and cable are not included) ■ Compliance: CE marking, RoHS *For more details, please refer to the PDF document or feel free to contact us.

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【Applications】 ■ Pressure measurement of automated vacuum systems ■ Measurement and control of process pressures such as sputtering ■ Pressure measurement in multi-chamber systems ■ Pressure measurement of general vacuum equipment *For more details, please refer to the PDF document or feel free to contact us.

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Vacuum gauge series (crystal gauge / ionization vacuum gauge / thermocouple vacuum gauge)

Vacuum gauge series (crystal gauge / ionization vacuum gauge / thermocouple vacuum gauge)

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キヤノンアネルバ

キヤノンアネルバ 栗木本社

Machine elements and parts

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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.

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