Complete remote control is possible with abundant external control functions! We also accommodate custom power supply voltages.
The "M-723HG, M-823HG, M-923HG" series is a general-purpose B-A type ionization vacuum gauge series equipped with a variety of expansion boards that support diverse gauges. It comes standard with remote operation functions necessary for vacuum process control and an effective range hold function with APC (Automatic Pressure Control). The "M-823HG" features an auto-filament function that allows for the combination of wide-range B-A gauges and thermocouple gauges, enabling automatic switching between gauges to accurately cover the range from atmospheric pressure to high vacuum with a single unit. 【Features】 ■ Automatic switching of pressure ranges ■ Pressure and various messages displayed on LCD ■ Complete remote operation possible with rich external control functions ■ Two set points standard equipped ■ D/A output standard equipped for recorder output *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Other Features】 - Standard equipped with a convenient range hold function for APC (Automatic Pressure Control) - Automatic switching from rough gauges like TC and CM to B-A gauge with the auto filament function (M-823HG) - Adjustable sensitivity settings based on gas type - Power supply voltage can be customized to AC100V, AC115/200/230V - Functionality can be expanded with various options *For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■ Pressure measurement for automated vacuum systems ■ Measurement and control of process pressure such as sputtering ■ Pressure measurement in multi-chamber systems ■ Pressure measurement for general vacuum equipment *For more details, please refer to the PDF document or feel free to contact us.
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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.
