Excellent basic performance that supports advanced analysis! Transducer type with a low gas emission ion source.
The "M-101/201QA-TDM" is a quadrupole mass spectrometer specifically designed for PC control, achieving high sensitivity, high functionality, and low gas emissions. It uses a secondary electron multiplier in the detector, allowing for fine adjustments of ionization voltage and emission current. It is widely used for gas analysis in thin film manufacturing equipment and accelerator gas analysis, among other applications. Additionally, we offer a cost-effective version suitable for residual gas monitoring in various vacuum systems, the "M-070QA-TDF." 【Features】 ■ Uses a secondary electron multiplier in the detector ■ Adopts a low gas emission ion source ■ Allows for fine adjustments of ionization voltage and emission current ■ QUADVISION ■ Comes standard with a rich array of I/O functions *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Lineup】 ■Standard Models ・M-070QA-TDF ・M-101QA-TDF ■High Sensitivity Models ・M-101QA-TDM ・M-201QA-TDM *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■Residual gas monitoring, vacuum monitoring for accelerators, inorganic gas analysis, temperature-programmed desorption gas analysis, etc. *For more details, please refer to the PDF document or feel free to contact us.*
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Company information
Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.