Easy measurement possible with computer control! Application technology products of quadrupole mass spectrometers.
The "D Series" is a suitable gas analysis system for various gas analysis and research and development fields. It allows for easy measurements controlled by a computer. Depending on the application, it features a flexible configuration that can combine a quadrupole mass spectrometer with a TMP exhaust system and optional components. 【Features】 ■ Five models to choose from: ・M-101QA-TDF, M-101/201QA-TDM, M-401QA-M (high sensitivity/high speed) ■ System upgrades can be combined according to application needs ■ Compact and space-saving ■ Easy operability *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Lineup】 ■M-101GA-DF ■M-101GA-DM ■M-201GA-DM ■M-401GA-DM *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Residual gas analysis of vacuum systems ■ Gas analysis of thermal balances ■ Temperature-programmed desorption gas analysis ■ In-furnace gas analysis and monitoring - Vacuum heat treatment furnaces, vacuum carburizing furnaces, vacuum nitriding furnaces, metal melting furnaces, biogasification furnaces, electron beam melting furnaces (EB furnaces), wafer pull-up furnaces, etc. ■ Sealed gas analysis, etc. *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.