The quadrupole mass spectrometer is available in four models! A space-saving and easy-to-use analysis system.
The "C Series" is a gas analysis system that is designed to be simple and compact while accommodating a variety of gas analysis applications. By selecting the basic configuration (exhaust system + mass filter) and further choosing from a range of recommended options that are preset for various applications, it is possible to create a system configuration that suits the customer's needs. Despite its simplicity, it comes standard with basic interlock functions, allowing for safe use. 【Features】 ■ Flexible customization options ■ Can be installed in a compact space of W480mm x D500mm ■ Simple yet equipped with basic interlock functions as standard ■ Can be ordered as an exhaust unit for gas analysis without the need for an analysis tube *For more details, please refer to the PDF document or feel free to contact us.
Inquire About This Product
basic information
【Lineup】 ■M-070GA-CRFY ■M-101GA-CRFY ■M-101GA-CRMY ■M-201GA-CRMY *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Applications】 ■ Gas measurement for research and development purposes - In-furnace gas analysis and monitoring Vacuum heat treatment furnaces, vacuum carburizing furnaces, vacuum nitriding furnaces, metal melting furnaces, biogasification furnaces, electron beam melting furnaces (EB furnaces), wafer pull-up furnaces, etc. - Thermal desorption gas analysis - Catalytic reaction gas analysis ■ Gas analysis for process equipment applications - Process gas measurement for vacuum equipment - Residual gas measurement/leak detection for vacuum equipment *For more details, please refer to the PDF document or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.