Precision stages optimal for semiconductor inspection equipment and semiconductor manufacturing equipment! Achieving straightness and positioning accuracy on the nanometer order!
◆The perfect stage for ultra-precise positioning! The stage is the heart of the equipment, governing its accuracy. At PMT, we manufacture ultra-precise stages that can be used in equipment such as wafer inspection systems and exposure systems, which require high positioning accuracy and repeatability.
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basic information
◆Achieve high straightness, positioning/repeatability accuracy with non-contact & ultra-precision machining! By using a non-contact air slide, there is no dust generation, allowing for maintenance-free operation. Additionally, by using guides made of ultra-high precision fine ceramics and assembling and adjusting them in a precision constant temperature environment, we achieve positioning/repeatability accuracy on the order of nanometers and extremely high motion accuracy (*). (* The positioning accuracy/repeatability accuracy depends on the configuration of the stage and the operating environment. We will provide suggestions to achieve your desired accuracy, so please feel free to consult with us.)
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Applications/Examples of results
◆Applications Semiconductor manufacturing equipment such as exposure devices Semiconductor inspection equipment Optical modules and semiconductor assembly equipment Precision measuring instruments ◆Production Achievements-1 (See attached image) Stage type: Ceramic XYZ 3-axis stacked Drive method: Coarse movement: Ball screw Fine movement: PZT (Piezo) Encoder: Optical linear encoder Stroke: X, Y: 10mm Z: 5mm Repeatability: X, Y, Z: ±0.01µm or less ◆Production Achievements-2 (See attached image) Stage type: Ceramic XYZθ air slide stage Encoder: X, Y: Laser interferometer Z, θ: Optical linear encoder Stroke: X, Y: 300mm Z: 7mm Positioning accuracy: X, Y: ±1.0µm/300mm Repeatability: X, Y: ±0.1µm Straightness: X, Y: ±0.2µm or less/300mm Orthogonality: X, Y: ±0.5µm or less/300mm
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Company information
In September 1991, PMT Corporation was founded as a general trading company for semiconductor manufacturing equipment. Since then, after processing parts and designing and manufacturing molds, we established ultra-precision axis control technology. We have leveraged this as our strength and applied it to various machines and devices, including the nano-stage system, NC fine processing machines, and maskless exposure devices. Currently, we are also engaged in automation systems specialized for the life sciences sector and robotics projects that solve challenges in manufacturing sites, continuing to create products that transcend industry boundaries. Our motto is, "What shall we create with PMT?" Please let us know your requests first.