Positioning with 10nm resolution! Linear stage compatible with single-axis and multi-axis.
The FB linear stage can be used in both single-axis and multi-axis applications. The stage configuration utilizes cross roller bearings, linear optical encoders, and ultrasonic (piezo) motors from Nanomotion. The stage is available in a wide range of travel lengths and can be combined in X/Y or X/Y/Z or other multi-axis configurations. The encoder resolution can be selected from 0.1μm, 1μm, 0.5μm, 50nm, or 10nm.
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〇 Example of Mechanical Characteristics (FBS100100) Stage Plate Material: Aluminum - Black Anodized Motor: HR8 Motor Bearing Type: Precision Cross Roller Bearing with Roller Movement and Anti-Slip Function Encoder: Optical Linear Encoder with Gold Tape Scale Cable Length: 3m MTBF (Mean Time Between Failures): 30,000 Hr Stage Mass: 1811g Moving Mass: 710g RoHS: Compliant Vacuum Compatibility Options: High Vacuum (HV) up to 1.4×10-5Pa (10-7 Torr) Ultra High Vacuum (UHV) up to 1.4×10-8Pa (10-10 Torr) 〇 Performance Specifications Travel Range (mm): 100mm Encoder Resolution: Standard 100nm Option 10nm Bidirectional Repeatability: Standard 1μm Option 100nm Absolute Accuracy (Error Map Available): Standard 10μm Option 7μm Maximum Speed: Maximum Speed 250mm/second
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[Applications] ■Semiconductors, biomedical, and measurement instruments *For more details, please refer to the PDF document or feel free to contact us.
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A workshop skilled in servo control. ○ In hydraulic servo control, we design and manufacture control devices, create control software, and collaborate with partner companies to design and produce optimal hydraulic units and hydraulic cylinders. We also select components such as hydraulic servo valves. ○ High-speed movement and high-precision positioning using ultrasonic motors. ○ Utilization in robots and unmanned transport vehicles with drivers for servo motors. ○ Controllers and control devices for construction machinery developed through contract development. ○ Creating moving objects such as hydraulic robots and designing and manufacturing 2-axis or 6-axis motion bases through industry-academia collaboration.