Supports various speed, force, and positioning requirements up to 1μrad.
The FR Rotary Stage (FRS060) utilizes ultrasonic motors, cross roller bearings, and non-contact high-resolution rotary encoders to provide the most compact footprint. By combining various encoder resolutions and motors, the FRS060 can accommodate a range of speed, force, and positioning requirements down to 1μrad. The FRS060 rotary stage is available in standard, vacuum, and UHV configurations.
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〇 Mechanical Characteristics (e.g., FRS060360) Stage Plate Material: Aluminum - Black Anodized Motor: HR2 Motor Bearing Type: Precision Cross Roller Bearing, with Roller Movement and Anti-Slip Function Encoder: Optical Linear Encoder with Gold Tape Scale Cable Length: 3m MTBF (Mean Time Between Failures): 30,000 Hr Stage Mass: 581g Moving Mass: 268g Moving Inertia Mass: 0.102 gr-m² RoHS: Compliant Vacuum Compatibility Options: High Vacuum (HV) up to 1.4×10-5 Pa (10-7 Torr) Ultra High Vacuum (UHV) up to 1.4×10-8 Pa (10-10 Torr) 〇 Performance Specifications Travel Range (mm): nx 360 Encoder Resolution: Standard 5 arc sec. (Optional 0.5 arc sec.) Bidirectional Repeatability: Standard 50 arc sec. (Optional 5 arc sec.) Accuracy: Standard 10 arc sec. (Optional 5 arc sec.)
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【Applications】 ■Semiconductors, biomedical, and measurement instruments *For more details, please refer to the PDF document or feel free to contact us.
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A workshop skilled in servo control. ○ In hydraulic servo control, we design and manufacture control devices, create control software, and collaborate with partner companies to design and produce optimal hydraulic units and hydraulic cylinders. We also select components such as hydraulic servo valves. ○ High-speed movement and high-precision positioning using ultrasonic motors. ○ Utilization in robots and unmanned transport vehicles with drivers for servo motors. ○ Controllers and control devices for construction machinery developed through contract development. ○ Creating moving objects such as hydraulic robots and designing and manufacturing 2-axis or 6-axis motion bases through industry-academia collaboration.