No errors due to wedge angle.
The FZ wedge-shaped stage (FZ080) is a precision vertical movement stage utilizing a wedge mechanism. The 80mm square stage employs precision cross rollers for linear movement and allows for vertical displacement of up to 10mm. The wedge mechanism uses high-precision optical position sensors to encode vertical displacement, enabling access from any direction.
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basic information
〇 Mechanical Characteristics (FBZ085010) Stage Plate Material: Aluminum - Black Anodized Motor: HR8 Motor (Piezo Ultrasonic Standing Wave Motor) Bearing Type: Precision Cross Roller Bearing, with Roller Movement and Anti-Slip Function Encoder: Optical Linear Encoder with Gold Tape Scale Cable Length: 3m MTBF (Mean Time Between Failures): 30,000 Hr Stage Mass: 1300g Moving Mass: 310g RoHS: Compliant Vacuum Compatibility Options: High Vacuum (HV) up to 1.4×10-5 Pa (10-7 Torr) Ultra High Vacuum (UHV) up to 1.4×10-8 Pa (10-10 Torr) 〇 Performance Specifications Travel Range (mm): 10mm Encoder Resolution: Standard 10nm Bidirectional Repeatability: Standard 0.1μm Accuracy Standard: 3μm Minimum Feed Amount for Each Mode (depends on encoder and control): AC Mode 100nm UHR Mode 5nm DC Mode <1nm
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【Applications】 ■Semiconductors, biomedical, and measurement instruments *For more details, please refer to the PDF document or feel free to contact us.*
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Company information
A workshop skilled in servo control. ○ In hydraulic servo control, we design and manufacture control devices, create control software, and collaborate with partner companies to design and produce optimal hydraulic units and hydraulic cylinders. We also select components such as hydraulic servo valves. ○ High-speed movement and high-precision positioning using ultrasonic motors. ○ Utilization in robots and unmanned transport vehicles with drivers for servo motors. ○ Controllers and control devices for construction machinery developed through contract development. ○ Creating moving objects such as hydraulic robots and designing and manufacturing 2-axis or 6-axis motion bases through industry-academia collaboration.