For devices that cannot be realized with just the standard ultrasonic motor stage, we design and manufacture custom-made stages ★ Proven results in space.
We design and manufacture high-speed movement, precise positioning, and vacuum-compatible stages using ultrasonic motors for applications such as prototyping and small-lot production for development purposes. Nanomotion's ultrasonic motors feature direct drive with no backlash and can hold the stage without power. They can also be used in high vacuum environments, and non-magnetic models are available for MRI and ion beam applications. ■ 1nm Multi-Axis Precision Stage for Semiconductor Manufacturing Evaluation A 3-axis stage used within a vacuum chamber that has sub-nanometer step resolution using SE motors, manufactured for semiconductor 7nm process development. ■ Multi-Axis Platform for Laser Communication for Low Earth Orbit Satellites The stage with ultrasonic motors cancels the continuous vibrations of the satellite caused by actuators, enabling laser communication with Earth. ■ Lens Drive Module for Wafer Inspection An autofocus module using a compact EDGE motor. *For other examples, please refer to the "Examples of Achievements" section below. Additionally, Nanomotion's ultrasonic motors can be widely used in medical devices, spectrometers, optical alignment, analytical instruments, and more. We offer assistance with prototyping and development.
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basic information
【Main Ultrasonic Features】 ■HR Motor (Standard Type) Speed range of 1μm to 250mm/sec, step resolution of 1nm, maximum driving force of 32N ■SE Motor (Latest Type) Speed range of 1μm to 500mm/sec, sub-nm step resolution, maximum driving force of 32N ■EDGE Motor (Compact and Lightweight) Maximum speed of 120mm/sec, step resolution of 100nm, driving force of 300mN, mass of 0.55g
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Estimates will be provided on a case-by-case basis for custom products.
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Applications/Examples of results
【Representative Stage Prototyping and Development Examples (Domestic and International)】 ○ Multi-axis platform for laser communication with low Earth orbit satellites ○ Stage for atomic force microscopy ○ Precision rotating stage for synchrotron facilities ○ 4-axis (X-Y-Z-T) stage for ion beam (FIB) inspection ○ 1nm multi-axis precision stage for semiconductor manufacturing evaluation ○ 5-axis low-speed motion stage for cell imaging ○ Autofocus module considering SWaP ○ Miniature gimbal for drone-mounted cameras ○ Drive module for lenses used in wafer inspection
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A workshop skilled in servo control. ○ In hydraulic servo control, we design and manufacture control devices, create control software, and collaborate with partner companies to design and produce optimal hydraulic units and hydraulic cylinders. We also select components such as hydraulic servo valves. ○ High-speed movement and high-precision positioning using ultrasonic motors. ○ Utilization in robots and unmanned transport vehicles with drivers for servo motors. ○ Controllers and control devices for construction machinery developed through contract development. ○ Creating moving objects such as hydraulic robots and designing and manufacturing 2-axis or 6-axis motion bases through industry-academia collaboration.