Achieving maskless photolithography for three-dimensional shapes through 5-axis stage control!
The "3D Shape Laser Exposure Device" enables fine patterning on various shapes through a 5-axis stage configuration (3 linear axes and 2 rotational axes). Since it performs direct exposure using a semiconductor laser, there is no need for a metal mask, contributing to reduced research and development time and budget. Additionally, it can read data created in 2D and 3D CAD using dedicated conversion software. 【Features】 ■ 5-axis stage configuration (3 linear axes and 2 rotational axes) ■ Capable of fine patterning on various shapes ■ No need for a metal mask, contributing to reduced research and development time and budget ■ Can read data created in 2D and 3D CAD using dedicated conversion software ■ Easy alignment of three-dimensional structural samples with the alignment assistance mechanism *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications (Excerpt)】 ■ Light source: 375nm semiconductor laser ■ Minimum line width: 15μm (target 5μm) ■ Objective lens used: X2 long working distance objective lens (development of objective lens with x10 magnification is also in progress) ■ Maximum work size: Cube with a side length of 100mm or less ■ Device dimensions: W1000×H1800×D900 ■ Auto focus ・ During exposure: Triangulation method using red laser ・ During alignment: Contrast method using camera image ■ Functions: Position and angle alignment, observation mechanism *For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■ IoT and IoH (Internet of Human) devices ■ Smartphones ■ Sensing for autonomous driving, etc. ■ Microelectronics *For more details, please refer to the PDF document or feel free to contact us.
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A pioneer of laser manufacturing in Japan. For 30 years, we have developed and supplied various types of lasers including HeNe, semiconductor, YAG, CO2, and ruby lasers. Recently, we have expanded our lineup of laser application system products, including vibration meters, displacement meters, laser direct writing devices, and magneto-optical property measurement devices, and we are striving to meet all needs related to lasers.