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  6. [TMF Implementation Case] Microelectronics Factory (Shenzhen, China)

[TMF Implementation Case] Microelectronics Factory (Shenzhen, China)

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last updated:Jan 20, 2023

アクアテクノロジー 環境事業部
アクアテクノロジー 環境事業部
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Verification that the introduction of the TMF system is a suitable choice! Industrial wastewater treatment and recycling system.

Dicing and back grinding are processes for cutting and thinning silica wafers in semiconductor device manufacturing. After these processes, the wafers are washed with ultra-pure water (UPW) to remove fine silica particles and other impurities. This wastewater contains fine silica particles from the ultra-pure water, and it may also be mixed with grinding fluid. When discharging this industrial wastewater in accordance with legal standards or performing further clarification treatment for wastewater reuse, the removal of those impurities that are highly concentrated in the wastewater is essential. In this semiconductor manufacturing site, we will verify that the introduction of the TMF system is a suitable choice. [Installation Site] ■ Microelectronics factory in Shenzhen, China *For more details, please refer to the PDF document or feel free to contact us.

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スクリーンショット

[TMF Implementation Case] Microelectronics Factory (Shenzhen, China)

スクリーンショット 2021-06-29 101557.png
スクリーンショット 2021-06-29 101557.png
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【Detailed Information on TMF System Installation】 ■Water Purification Capacity: 35m3/hr (when using 3 skids), 12m3/hr (per skid) ■Module: TMF System (Module Model #MME3005613VP) ■Number of Tubes in Module: 13 ■Membrane Tube Diameter: 1 inch ■Membrane: 0.05 microns ■Effective Membrane Surface Area: 1.82m3 (per module) ■Module Housing: PVC (Polyvinyl Chloride) membrane ■Number of Modules: 11 modules × 2 rows = 22 modules (per skid) ■Membrane Flux: Approximately 280 Lit/m2/hr *For more details, please refer to the PDF document or feel free to contact us.

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Suggestions for the Use of Tubular Membrane Filters (TMF) and Introduction of Case Studies

Suggestions for the Use of Tubular Membrane Filters (TMF) and Introduction of Case Studies

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アクアテクノロジー

アクアテクノロジー 環境事業部

Industrial Machinery

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We propose innovative water treatment technologies that can contribute to an environmentally friendly and sustainable society. Aqua Technology Co., Ltd. combines membrane treatment technology, which is the pinnacle of filtration technology, with eco-friendly and cost-friendly basic technologies to offer water treatment solutions tailored to our customers' needs. *For industrial products, we provide compact package plants of the WP series, which are low-cost and have short delivery times, as well as original plants designed to meet the specific conditions of the site, according to our customers' requests. *Would you like to reconsider your current system? We will propose capacity improvements for the industrial water, agricultural water treatment and circulation systems, and wastewater disposal and resource recovery systems you are currently using, taking into account benefits, costs, and risks. Please feel free to contact us.

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